Modeling and Characterization of MEMS Electrostatic Energy Harvester

In low-power wireless electronic devices, Energy harvesting generators have received increasing research interest in recent years. This paper describes the design and analysis of electrostatic transduction based MEMS energy harvester. Due to the benefit of a folded beam configuration that can be displace large dimensions and compliant in desired direction and stiffer in orthogonal direction. Since, large displacement of proof mass of energy harvester renders the enhance performance. Hence, the folded beam configuration of harvest has been modeled and designed and optimized the dimension of geometry. FEM simulations using COMSOL were conducted to evaluate the natural frequency and mode shape of the system and compared results with that of analytically calculated values. Spice circuit of harvester has been modeled and performed simulation to evaluate the output power of the harvester in LTSPICE. Parameter analysis was conducted to determine the optimal load and optimal output power